Nano-Structures for CD and Interconnect Metrology
Contact: Michael W. Cresswell
The overall goal of the Nano-Structures for CD and Interconnect Metrology Project is to contribute to a test-structure infrastructure relevant to state-of-the-art interconnect-system needs according to the International Technology Road-map for Semiconductors (ITRS) Interconnect Report 2005, which states that the function of an interconnect system is to distribute clock and other signals and to provide power/ground to the circuits and systems functions on a chip; develop test-structure-based reference materials with emphasis on supplying traceable ITRS-compliant physical standards for critical-dimension (CD) and overlay metrology-tool calibration; and contribute to organizations supporting the development of interconnect materials and standards for CD and overlay metrology applications in the semiconductor industry.
