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Media Count:
N/A
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Date:
Apr 1996
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Author:
O. R. Monteiro Z. Wang K. M. Yu
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Oxide ceramic films can be made using a vacuum arc based technique in which a metal plasma is formed in an oxygen background, with ion energy controlled by the application of a repetitive pulse bias to the substrate throughout the deposition. High ion ene ...
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Report Number:
LBL-38559 CONF-9605167-10
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Contract Number:
AC03-76SF00098
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Project Number:
N/A
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Grant Number:
N/A
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Task Number:
N/A
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NTIS announcement issue:
9701
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"N/A" indicates no data is available for this field.
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