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Diagnostics of Diamond Film Deposition Plasmas. - Final rept. 1 Mar 93-28 Feb 96.
SRI International, Menlo Park, CA. Molecular Physics Lab.

ProductType: Technical report
NTIS Order Number: AD-A313 765/0




 
Media Count: N/A
Date: Aug 1996
Author: K. R. Stalder J. B. Jeffries

Diagnostic measurements of diamond-depositing DC arcjet plasmas are described. Polycrystalline diamond films with high-quality Raman spectra are grown using both low-pressure (5 to 40 Torr) and high-pressure (200 Torr) plasma arcjets. A number of differen ...

Report Number: SRI-MP-96-108
Contract Number: DAAH04-93-K-0001
Project Number: N/A
Grant Number: N/A
Task Number: N/A
NTIS announcement issue: 9702

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