Deposition and Microfabrication
EMSL offers deposition and microfabrication tools that can be used to tailor surfaces, atom by atom. With an emphasis on oxide mineral films and interfaces, users apply these tools to design and construct materials of various size distributions, ranging from high-quality, single-crystal thin films to nanostructures, with real-world applications. These materials are subsequently characterized and studied in detail using EMSL's mass spectrometry, microscopy, as well as spectroscopy and diffraction capabilities.
Additional Information
- Growth of complex oxide films research – to synthesize oxides of interest, with a high degree of control, for their chemical, catalytic, electronic, and magnetic properties
- Geochemistry and biogeochemistry investigations – to prepare environmental interfaces such as stable oxides of iron that serve as substrates for heterogeneous surface organic, inorganic, and biochemical interactions
- Photochemistry studies – to prepare crystalline pure and doped oxide films to study the role of heterojunctions in photochemistry and photocatalysis
- Spintronics research – to construct magnetically doped transition metal oxides that exhibit ferromagnetism at and above room temperature and to determine the complex interrelationships between composition-structure and electronic-magnetic properties
- Microfabrication – to design and construct materials useful for chemical and biological sensing, to microfabricate components for optical microscopy applications, and to design and construct microfluidics systems
- Ion soft-landing – to prepare uniform films of high-purity materials using low-energy beams of mass-selected complex ions
Capability Detail
Refer to the table below for a full listing, which leads to complete information about each of EMSL's deposition and microfabrication instruments. In brief, these instruments offer EMSL users the following capabilities:
- Unique oxygen plasma-assisted molecular beam epitaxy system designed in house
- Metalorganic chemical vapor deposition
- Ballistic deposition, spin coating, and wet chemical synthesis
- Ion beam synthesis and ion beam-assisted deposition
- Microfabrication equipment and clean-room capabilities.
All Related Publications Related Publications
- Apoferritin-Templated Yttrium Phosphate Nanoparticle Conjugates for Radioimmunotherapy of Cancers.
- Sensitive electrochemical immunoassay for 2,4,6-trinitrotoluene based on functionalized silica nanoparticle labels.
- Radionuclide Sensors for Environmental Monitoring: From Flow Injection Solid-Phase Absorptiometry to Equilibration-Based Preconcentrating Minicolumn Sensors with Radiometric Detection.
- The Synthesis of Ag-Doped Mesoporous TiO2 .
- Chemical Speciation of Sulfur in Marine Cloud Droplets and Particles: Analysis of Individual Particles from the Marine Boundary Layer Over the California Current.
Related Research Highlights
- Conductivity of Oriented Samaria-Doped Ceria Thin Films Grown by Oxygen-Plasma-Assisted Molecular Beam Epitaxy (The Good Samaria)
Deposition and Microfabrication Capabilities Available at EMSL
Instrument | Contact |
---|---|
Deposition: Chemical Vapor, Oxide Metalorganic |
Saraf, Lax |
Deposition: Molecular Beam Epitaxy #1 |
Chambers, Scott Droubay, Timothy C Kaspar, Tiffany C |
Deposition: Molecular Beam Epitaxy #2 |
Saraf, Lax |
Deposition: Pulsed Laser Deposition System |
Chambers, Scott Droubay, Timothy C Kaspar, Tiffany C |
Electron Microscope: Dual-Beam FIB/SEM |
Arey, Bruce Saraf, Lax |
Ion Accelerator, Beam Lines, and End Stations |
Shutthanandan, Shuttha |
Mass-Selected Ion Deposition System - Electrospray Source |
Laskin, Julia |
Microfabrication Laboratory (Clean Room) 1302 |
Saraf, Lax |
Surface Dynamics/Ion Deposition System |
Cowin, Jim |
Deposition and Microfabrication Capability Steward:
Roy Gephart |
roy.gephart@pnl.gov,
509-371-6142
Deposition and Microfabrication Capability Steward: Theva Thevuthasan | theva@pnl.gov, 509-371-6244
Deposition and Microfabrication Capability Steward: Theva Thevuthasan | theva@pnl.gov, 509-371-6244