Frontiers of Characterization and Metrology for Nanoelectronics
(week of) May 11-15, 2009
College of Nanoscale Science and Engineering, University at Albany, Albany, NY
Confirmed Speakers
- Sitaram Arkalgud, SEMATECH
- Amal Chabli, CEA-DRT-LETI
- T.C. Chen, IBM
- Alain Diebold, CNSE, Univ. at Albany
- Bruce Doris, IBM
- Holm Geisler, AMD Dresden
- Greg Hughes, SEMATECH
- Alain Kaloyeros, Senior VP and CEO, CNSE, Univ. at Albany
- Christian Kisielowski, NCEM/LBNL
- Joseph Kopanski, NIST
- Ji Ung Lee, CNSE, Univ. at Albany
- Meyya Meyyapan, Director, Center for Nanotechnology, NASA
- Chris Ober, Cornell
- Prof. Wolfgang Osten, ITO Stuttgart
- Michael Postek, NIST
- Derk Rading, ION-TOF GmbH
- Bart Rijpers, ASML
- Michael Steigerwald, Carl Zeiss
- Hans Stork, AMAT
- Brad Thiel, University at Albany, SUNY
- Wilfired Vandervorst, IMEC
- Francois Vurpillot, Institut des Materiaux
- Jeff Welser, SRC
The 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (formerly titled Characterization and Metrology for ULSI Technology) will be held the week of May 11-15, 2009, at the College of Nanoscale Science and Engineering, University at Albany, Albany, New York. This conference, the seventh in the series, focuses on the frontiers and innovation in characterization and metrology of nanoelectronics.
For details on the proceedings of our previous conferences, please visit the American Institute of Physics (AIP).
Committee Co-Chairs
- David Seiler, NIST
- Alain Diebold, University at Albany
- Bob McDonald, Technology Associates (Treasurer)
- Mike Garner, Intel
- Dan Herr, SRC
- Rajinder Khosla, NSF
Committee Members
- Caroline Ayre, Numonyx
- Harold Bloess, Qimonda
- Alexander Braun, Semiconductor International
- Amal Chabli, LETI
- Michael Current, Frontier Semiconductor
- Dick Hockett, Evans Analytical Group LLC
- Toshihiko Kanayama, AIST
- David Kyser, Applied Materials
- Shifeng Lu, Micron
- Ulrich Mantz, Zeiss
- Lori S. Nye, Brewer Science, Inc.
- Yaw Obeng, NIST
- Sandip Tiwari, Cornell University
- Victor Vartanian, ISMI
- Wilfried Vandervorst, IMEC
- Bettina Weiss, SEMI
- Ehrenfried Zschech, AMD
Sponsors
