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Bringing Polymer Patterns into Focus

Eric Lin places a semiconductor wafer in the path of a focused neutron beam.

Working at the NIST Center for Neutron Research, chemical engineer Eric Lin places a semiconductor wafer in the path of a focused neutron beam. The beam is used to determine the size and shape of polymer patterns on the silicon wafer. Twenty-eight magnesium fluoride lenses focus the neutron beam so that the instrument can characterize polymer structures between 100-300 nanometers wide.

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