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The Process Integration Approach

The vision of the National Center for Photovoltaics (NCPV) includes integrating the tools and techniques used for:

  • Deposition—such as physical vapor deposition or chemical vapor deposition;
  • Processing—such as etching or rapid thermal annealing; and
  • Characterization—such as spectroscopic ellipsometry or atomic force microscopy.

The Fundamental Concept

This video is a narrated animation that explains process integration and shows how we are implementing it. | Text version

The process integrates all the tools…all the data…and all the materials—as shown in the list and illustration below:

  1. Tools
    • Allows sequencing of any number of fabrication, processing, and measurement steps, and in any order
    • Avoids exposure of samples to air between steps
    • Provides cost advantages, eliminating the need for a cleanroom and for replicating capabilities on other platforms.
  2. Data
    • Facilitates the understanding of data throughout the full scientific cycle—from conjecture, to fabricate/process/measure, to analyze/interpret, to learn and report
    • Allows automated control of deposition, processing, and measurements, thus increasing throughput and repeatability
    • Makes the entire history of the sample available to appropriate collaborators
  3. Materials
    • Expands device design beyond the limits of existing technology equipment sets
    • Fosters interaction of experts from various materials and characterization areas to synergistically answer specific questions
    • Allows combinatorial techniques to be incorporated, when appropriate
Schematic diagram of process-integration approach: (1) Integrates all the tools used in fabricating, processing, and measuring solar samples; (2) Integrates all the data generated when proceeding from some conjecture about a solar device, through creating and measuring the device, to studying, understanding, and using the results and sharing with others; and (3) Integrates all materials, allowing techniques used in one material area to be carried over to other material systems in new ways.

Some Great Benefits

By building the process integration capability, we are gaining the following benefits and more:

  • Improved simulation of industrial processes
  • Answers to previously inaccessible research questions
  • Control and characterization of critical surfaces and interfaces
  • Development of new techniques, methodologies, and device structures

Making It Possible

These capabilities are possible because we have focused on several factors:

  • Standard sample size and shape
    • The maximum sample size is 157 mm x 157 mm (6 in x 6 in)
    • A special metal frame (a platen) can hold samples of various sizes and shapes
  • Mechanism for moving samples within a tool
    • An articulated robotic arm operates within the main transfer chamber
    • The samples remain within vacuum under ambient conditions
  • Mechanism for moving samples between tools
    • Samples can be loaded into a mobile transfer pod, to be moved to other tools
    • The pod-to-tool interface allows the transfer under vacuum conditions
  • Standard mechanical interface
    • 10-in conflate flange centered
    • 1.1-meter above the floor

Contact Brent Nelson for more information on process development and integration.