The Process Integration Approach
The vision of the National Center for Photovoltaics (NCPV) includes integrating the tools and techniques used for:
- Deposition—such as physical vapor deposition or chemical vapor deposition;
- Processing—such as etching or rapid thermal annealing; and
- Characterization—such as spectroscopic ellipsometry or atomic force microscopy.
The Fundamental Concept
This video is a narrated animation that explains process integration and shows how we are implementing it. | Text version
The process integrates all the tools…all the data…and all the materials—as shown in the list and illustration below:
- Tools
- Allows sequencing of any number of fabrication, processing, and measurement steps, and in any order
- Avoids exposure of samples to air between steps
- Provides cost advantages, eliminating the need for a cleanroom and for replicating capabilities on other platforms.
- Data
- Facilitates the understanding of data throughout the full scientific cycle—from conjecture, to fabricate/process/measure, to analyze/interpret, to learn and report
- Allows automated control of deposition, processing, and measurements, thus increasing throughput and repeatability
- Makes the entire history of the sample available to appropriate collaborators
- Materials
- Expands device design beyond the limits of existing technology equipment sets
- Fosters interaction of experts from various materials and characterization areas to synergistically answer specific questions
- Allows combinatorial techniques to be incorporated, when appropriate
![Schematic diagram of process-integration approach: (1) Integrates all the tools used in fabricating, processing, and measuring solar samples; (2) Integrates all the data generated when proceeding from some conjecture about a solar device, through creating and measuring the device, to studying, understanding, and using the results and sharing with others; and (3) Integrates all materials, allowing techniques used in one material area to be carried over to other material systems in new ways.](images/pdilconcept.gif)
Some Great Benefits
By building the process integration capability, we are gaining the following benefits and more:
- Improved simulation of industrial processes
- Answers to previously inaccessible research questions
- Control and characterization of critical surfaces and interfaces
- Development of new techniques, methodologies, and device structures
Making It Possible
These capabilities are possible because we have focused on several factors:
- Standard sample size and shape
- The maximum sample size is 157 mm x 157 mm (6 in x 6 in)
- A special metal frame (a platen) can hold samples of various sizes and shapes
- Mechanism for moving samples within a tool
- An articulated robotic arm operates within the main transfer chamber
- The samples remain within vacuum under ambient conditions
- Mechanism for moving samples between tools
- Samples can be loaded into a mobile transfer pod, to be moved to other tools
- The pod-to-tool interface allows the transfer under vacuum conditions
- Standard mechanical interface
- 10-in conflate flange centered
- 1.1-meter above the floor
Contact Brent Nelson for more information on process development and integration.