|
Calibration Research: length, mass, force, acceleration, acoustical pressure, measurement uncertainty |
|
Material Removal Processes: milling, turning, grinding, lapping, polishing |
|
Coordinate and Machine Tools: CMMs, laser trackers, probes, performance, condition based maintenance |
|
Interoperability / Integration: sensor interfacing and networking, open architecture control, product data standards, conformance testing, STEP |
|
|
Surface and Nano: roughness, stylus instruments, interferometry, STM, AFM, SEM, Linewidth, photomasks |
|
Laser and Optics: interferometry, striae, air refractivity, surface finish, EUVL |
|
Simulation, Visualization and Modeling: Simulation architectures and interfaces, distributed simulation standards,
neutral models and prototypes |
|
Fabrication Technology: Fabrication support for NIST staff |
|
|