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NIST Standard Reference Database 64

NIST Electron Elastic-Scattering Cross-Section Database: Version 3.1

Version 3.0 of this database provides values of differential elastic-scattering cross sections, total elastic-scattering cross sections, phase shifts, and transport cross sections for elements with atomic numbers from 1 to 96 and for electron energies between 50 eV and 300 keV (in steps of 1 eV). The cross section in the database were provided by Prof. F. Salvat using relativistic theory. The software, developed by Prof. A. Jablonski, has the following features:

• graphical display of differential elastic-scattering cross sections in different coordinate systems

• graphical display of the dependence of transport cross sections on electron energy

• display of numerical values of differential elastic-scattering cross sections, total elastic-scattering cross sections, and transport cross sections

• creation of files containing differential elastic-scattering cross sections for specified elements, energies and coordinates

• creation of files containing plots of differential elastic-scattering cross sections versus scattering angle for one or more elements or for one or more electron energies

• creation of files containing phase shifts for specified elements and for energies up to 20 000 eV

• creation of files containing transport cross sections for specified elements and energies

• creation of random number generators providing the polar scattering angles to be used in Monte Carlo simulations of electron transport in solids; and

• runs of the random number generators

Knowledge of elastic-scattering effects is important for the development of theoretical models for quantitative analysis by Auger-electron spectroscopy, x-ray photoelectron spectroscopy, electron microprobe analysis, and analytical electron microscopy. The software package is designed to facilitate simulations of electron transport for these and similar applications in which electron energies from 50 eV to 300 keV are utilized.

Hardware Requirements: PC with Windows 95, 98, NT, 2000, ME or XP; CD-ROM drive; Hard disk space of at least 52 MB.

Cost: No charge

For more information please contact:

Scientific Contact:

Keywords: Auger electron spectroscopy; cross-section; elastic scattering; electron scattering; electron spectroscopy; electron transport; x-ray photoelectron spectroscopy; x-ray spectroscopy, electron-probe microanalysis, analytical electron microscopy, and surface analysis.