Recent advancements in the
semiconductor industry have resulted in new problems involving the
photoresist-liquid interface. For immersion lithography, the water
profile within a resist film impacts pattern quality from changes
in photoacid generator diffusion or optical transparency. For the
development step, where a latent image is realized into the final
structure, an improved understanding of photoresist swelling and dissolution
mechanisms is needed to address stringent line-edge roughness requirements.
Data from neutron reflectivity measurements provide critical insight
needed to understand and optimize next-generation photoresists and
process strategies.
Design issues relating to bioactive
devices for regenerative medicine reflect the spatial and chemical
complexity of biological and materials issues and their interactions.
Tools developed for the purpose of aiding understanding of these systems
must have sufficient discriminatory power to sort out this complexity.
We have introduced a relatively simple broadband spectroscopic microscopy
based on CARS that can be used to rapidly acquire volumetric, chemically-specific
images with submicrometer resolution.
There has been intense interest
in composites of polymers and carbon nanotubes (CNT) because of the
large transport property (conductivity, elasticity, viscosity, thermal
conductivity) changes exhibited by these additives for relative low
CNT concentrations (= 1 % volume fraction). NIST's experience in the
area of dielectric and rheological measurement, in conjunction with
expertise in modeling, puts it in a unique position to lead the development
of new processing concepts required by industry to utilize this important
new class of materials.
Advanced material products
incorporate highly designed polymer molecules, yet the effect of molecular
parameters on end use properties is not understood. From both a scientific
and an industrial perspective, there is a need for simple and economic
synthetic methods that generate combinatorial polymer libraries that
systematically vary molecular mass, architecture, and molecular composition.
New methods at the NIST Combinatorial Methods Center (NCMC) enable
the fabrication of polymer molecule libraries that are compatible
with high-throughput measurement methods.
High-throughput (HT) tools
to measure properties of complex fluids will greatly facilitate formulations
science. Industrial members of the NIST Combinatorial Methods Center
viewed a new HT method to measure interfacial tension as a primary
need for product development. We have addressed this challenge with
a novel microfluidic, high-throughput strategy to materials research
and development.
Polymer synthesis often results
in impure products, containing multiple end groups, due to the synthesis
process itself or the presence of impurities. Identification and quantification
of these end groups and impurities is important because they influence
polymer properties. An interlaboratory comparison of a mixture of
two polystyrenes, one terminated with a proton, and the other terminated
with a hydroxyl group, was performed using matrix-assisted laser desorption-ionization
mass spectrometry (MALDI-MS). This interlaboratory comparison will
be used to quantify the accuracy and repeatability of MALDI-MS in
the identification of multiple end groups as a result of polymer synthesis.
Embedded passive devices require
high dielectric constant hybrid materials consisting of filled polymers
to advance miniaturization and functional performance of high-speed
electronics. New metrology methods were developed to address the needs
of the electronics industry. Two test methods, a Test Method for Dielectric
Permittivity and Loss Tangent of Embedded Passive Materials from 100
MHz to 12 GHz and a Test Method for Dielectric Withstanding Voltage
were completed and have received wide acceptance by industry as new
test methods to accelerate the development of embedded passive device
technology.
NIST Material
Science & Engineering Laboratory - Polymers Division