The Process Sensing Group develops, validates, and applies state-of-the-art measurement techniques, sensors, and mathematical models required for analysis, control and optimization of industrial processes. The Group's research seeks to develop a fundamental understanding of, and generate critical data pertinent to plasma processing used in semiconductor manufacturing and other industries, and chemical sensor technology for chemical process, environmental, and health care applications.

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Research Areas

Solid State Chemical Sensor Arrays	Self-Assembled Monolayers	Plasma Process Metrology