NIST Materials Science and Engineering Laboratory - Polymers Division Staff- Chengqing Wang Polymer division banner Polymer division home page Research areas link Research projects link Research facilities link Staff contact link Search link NIST link Polymer division home page Materials Science and Engineering Laboratory

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Chengqing Wang , Ph.D.



 

Check my publications

Guest Researher

Electronics Materials
  
    Phone:
(301) 975-5221
    Fax:
(301) 975-3928
    Email:
chengqing.wang@nist.gov
    Mail:
8541
 

Research Interests

  • Investigate the fundamental materials sources of line-edge-roughness (LER) in photoresists and develop the theoretical framework to quantify LER using Small Angle x-Ray Scattering (SAXS) techniques.
  • Devoloping laboratory procedure for nanopatterning metrology by SAXS.

    • Professional Background

    • Dissertation: "Laser Light Scattering Study on Breathing Modes of Porous Hollow Spheres swollen in Liquid"
    • Advisor: Professor Chi Wu


    Publications

    1. Tengjiao Hu; Chengqing Wang; Fuming Li; Frank W. Harris; Stephen Z. D. Cheng; Chi Wu. Scalings of Fluorine-containing Polyimides in Cyclopentanone. Journal of Polymer Science, Part B: Polymer Physics, 2000, 38(16), 2077-2080. 2. Chengqing Wang; Suhong Jiang; Chi Wu. Application of the Temperature-Ramped Holographic Relaxation Spectroscopy in the Investigation of Physically Cross-Linked Gels. Macromolecules, 2001, 34(19), 6737-6741. 3. Chengqing Wang; Chi Wu. Vibrations of a Hollow Nanosphere with a Porous Thin Shell in Liquid. Macromolecules, 2003, 36(25), 9285-9287. 4. Ping Cai; Chengqing Wang; Jing Ye; Zuowei Xie; Chi Wu. Hybridization of Polymeric Micelles in a Dispersion Mixture. Macromolecules, 2004, 37(9), 3438. 5. He Cheng; Guangming Liu; Chengqing Wang; Guangzhao Zhang, Chi Wu, Collapse and swelling of poly(N-isopropylacrylamide-co-sodium acrylate) copolymer brushes grafted on a flat SiO2 surface, Journal of Polymer Science, Part B: Polymer Physics, 2006, 44(4), 770-778. 6. Ronald L. Jones, Wen-li Wu, Cheng-qing Wang, Eric K. Lin, Kwang-Woo Choi, Bryan J. Rice, George M. Thompson, Steven J. Weigand, Denis T. Keane, Proc. SPIE, 2006, 6152, 61520N.


    Presentations

    • Roughness Characterization of Nanoscale Structures with Small Angle X-ray Scattering, May 29-Jun 2, 2006, Baltimore,MD.
     
     
     
     
    NIST Materials Science & Engineering Laboratory - Polymers Division