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Eric K. Lin , Ph.D.



 

 

photograph of Eric Lin

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Division Chief

Division Office
  
    Phone:
(301) 975-6743
    Fax:
(301) 975-3928
    Email:
    Mail:
8541
 

Research Interests

Polymers for next-generation lithography, Polymers at surfaces and interfaces, physical and structural properties of inorganic-organic hybrid materials, structural characterization of porous thin films, organic electronics

Background

Ph. D., Chemical Engineering, Stanford University, (1996).

M. S., Chemical Engineering, Stanford University, (1992).

B. S. E., Chemical Engineering, Princeton University, summa cum laude, (1991).


Honors and Awards

National Academy of Sciences Frontiers of Science (2006)

National Academy of Engineering Frontiers of Engineering (2002)

Presidential Early Career Award for Scientists and Engineers (2002)

NIST Slichter Award (2001)

NIST Bronze Medal (2001)

NRC-NIST Postdoctoral Fellowship (1996-1998)

NSF Graduate Fellowship (1992-1996)

David S. Wu Graduate Fellowship (1991)

Xerox Prize - Senior Thesis (1991)

National Merit Scholar (1987-1991)


Selected Publications

E. K. Lin, C. L. Soles, D. L. Goldfarb, B. C. Trinque, S. D. Burns, R. L. Jones, J. L. Lenhart, M. Angelopoulos, C. G. Willson, S. K. Satija, and W. L. Wu, “Direct Measurement of the Reaction Front in Chemically Amplified Photoresists,” Science, 297, 372 (2002)

E. K. Lin, H. J. Lee, G. W. Lynn, W. L. Wu, and M. L. O’Neill, “Structural Characterization of a Porous Low Dielectric Constant Thin Film with a Non-uniform Depth Profile,” Appl. Phys.Lett., 81, 607 (2002).

S. Yang, P. A. Mirau, C. S. Pai, O. Nalamasu, E. Reichmanis, J. C. Pai, Y. S. Obeng, J. Seputro, E. K. Lin, H. J. Lee, J. Sun, and D. W. Gidley, "Nanoporous Ultra Low-Dielectric Constant Organosilicates Templated by Triblock Copolymers," Chem. Mat., 14, 369 (2001).

E. K. Lin, H. J. Lee, B. J. Bauer, H. Wang, W. L. Wu, and J. T. Wetzel, "Structure and Property Characterization of Low-k Dielectric Porous Thin Films Determined by X-ray Reflectivity and Small-angle Neutron Scattering," in Low Dielectric Constant Materials for IC Applications, edited by P. S. Ho, J. Leu, and W. W. Lee, Springer Publishing, Inc. (2001).

H. J. Lee, E. K. Lin, W. L. Wu, B. F. Fanconi, H. C. Liou, J. K. Lan, Y. L. Cheng, Y. L. Wang, M. S. Feng, and C. G. Chao, "X-ray Reflectivity Measurements of N2 Plasma Effects on the Density Profile of Hydrogen Silsesquioxane Thin Films," J. Electochem. Soc, 148, F195 (2001).

W. L. Wu, E. K. Lin, Q. H. Lin, and M. Angelopoulos, "Small Angle Neutron Scattering Measurements of Nanoscale Lithographic Features," J. Appl. Phys., 88, 7298 (2000).

D. J. Pochan, E. K. Lin, S. K. Satija, and W. L Wu, "Thermal Expansion of Supported Thin Polymer Films: A Direct Comparison of Free Surface vs. Total Confinement," Macromolecules, 34, 3041 (2001).

W. L. Wu, W. E. Wallace, E. K. Lin, G. W. Lynn, and C. J. Glinka, "Properties of Nanoporous Silica Thin Films determined by High Resolution X-ray Reflectivity and Small angle Neutron Scattering," J. Appl. Phys., 87, 1193 (2000).

E. K. Lin, R. Kolb, S. K. Satija, and W. L. Wu, "Enhanced Polymer Segment Exchange Kinetics due to an Applied Shear Field," Macromolecules, 32, 4741 (1999).

E. K. Lin, R. Kolb, S. K. Satija, and W. L. Wu, "Reduced Polymer Mobility near the Polymer/Solid Interface as Measured by Neutron Reflectivity," Macromolecules, 32, 3753 (1999).

E. K. Lin, C. R. Snyder, F. I. Mopsik, W. E. Wallace, W. L. Wu, C. X. Zhang, and R. M. Laine, "Characterization of Epoxy-functionalized Silsesquioxanes as Potential Underfill Encapsulants," in Organic/Inorganic Hybrid Materials, edited by R. M. Laine, C. Sanchez, E. Giannelis, and C. J. Brinker (Mat. Res. Soc. Proc., San Francisco, CA), 519, 15 (1998).

E. K. Lin, W. L. Wu, and S. K. Satija, "Polymer Interdiffusion near an Attractive Solid Substrate," Macromolecules, 30, 7224 (1997).

E. K. Lin, A. P. Gast, A. C. Shi, J. Noolandi, J., and S. D. Smith, "Effect of Short Diblock Copolymers at Internal Interfaces of Large Diblock Copolymer Mesophases," Macromolecules, 29, 5920 (1996).

E. K. Lin and A. P. Gast, "Semicrystalline Diblock Copolymer Platelets in Dilute Solution," Macromolecules, 29, 4432 (1996).

E. K. Lin and A. P. Gast, "Self-Consistent Mean Field Calculations of Interactions between Chains Tethered to Spherical Interfaces," Macromolecules, 29, 390 (1996).

G. A. McConnell, E. K. Lin, A. P. Gast, J. S. Huang, M. Y. Lin, and S. D. Smith, "Structure and Interactions in Tethered Chain Systems," Faraday Discussions of the Royal Society of Chemistry, 98, 121 (1994).


 
 
 
 
NIST Materials Science & Engineering Laboratory - Polymers Division