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The Electronics Materials Group provides standard measurements and data, develops and
applies in situ measurements on materials and material assemblies having micrometer- and submicrometer-scale
dimensions, quantifies the divergence of material properties from their bulk values as dimensions are reduced
and interfaces contribute strongly to properties, and develops fundamental understanding of materials needed
in future semiconductor electronics applications. The goal of this group is to be the key resource within the
Federal Government for materials metrology development for commercial semiconductor electronics manufacturing. |
